X-ACT is a software to emulate the host computer for the purpose of testing communication during the development of equipment SECS/GEM functionalities that are compliant with SEMI E4, E37.1, E5 and/or E30 standards.
X-ACT can connect with any GEM compliant equipment by using the generic “GEM Machine” module that comes provided. SECS logs and traces are available at both controller-level and on the equipment-connection level as documentation of the test results.
X-ACT comes with a user-friendly GUI to monitor SECS/GEM messages as well as simulate transactions pertaining to remote commands, process programs and terminal services. A dedicated tab for “SECS messages” allows Stream Functions to be defined and grouped according to scenarios for sending to equipment in characterisation tests.
X-ACT adheres strictly to the following standards:
X-ACT describes SECS message body using a general notation called SECS eXtensible Markup Language (SXML) which is developed by XYsoft. SXML is similar to the SML notation used in the SECS Standards documents but is based on the XML syntax which is widely used.
The following data types are supported by X-ACT: (SXML representation in parenthesis)