X-CHANGE adheres to specifications for data-items and communication-protocol-parameters in the following standards:
- SEMI E4 : SEMI Equipment Communications Standards 1 Message Transfer (SECS-I)
- SEMI E37.1 : High-speed SECS Message Service Single Selected-Session Mode (HSMS-SS)
- SEMI E5 : SEMI Equipment Communications Standards 2 Message Content (SECS-II)
- SEMI E30 : Generic Model for Communications and Control of Manufacturing Equipment (GEM)