X-ACT : SECS/GEM HOST SIMULATOR

X-ACT is a software to emulate the host computer for the purpose of testing communication during the development of equipment SECS/GEM functionalities that are compliant with SEMI E4, E37.1, E5 and/or E30 standards.

X-ACT can connect with any GEM compliant equipment by using the generic “GEM Machine” module that comes provided. SECS logs and traces are available at both controller-level and on the equipment-connection level as documentation of the test results.

X-ACT comes with a user-friendly GUI to monitor SECS/GEM messages as well as simulate transactions pertaining to remote commands, process programs and terminal services. A dedicated tab for “SECS messages” allows Stream Functions to be defined and grouped according to scenarios for sending to equipment in characterisation tests.

PRODUCT FEATURES

  • Single Equipment Connection
  • Support HSMS & SECS-I Protocols
  • Rich “Pre-defined SECS message” Set
  • Configurator-assisted “Message Builder
  • Support Testing of GEM Scenarios
  • “On-screen” Transaction Monitoring
  • “GEM Machine” Module Provided
  • Full SECS Logging and Traceability
  • Dedicated Tabs for equipment characterisation

Product Specification

X-ACT adheres to specifications for data-items and communication-protocol-parameters in the following standards:

  • SEMI E4 : SEMI Equipment Communications Standards 1 Message Transfer (SECS-I)
  • SEMI E5 : SEMI Equipment Communications Standards 2 Message Content (SECS-II)
  • SEMI E30 : Generic Model for Communications and Control of Manufacturing Equipment (GEM)
  • SEMI E37.1 : High-speed SECS Message Service Single Selected-Session Mode (HSMS-SS)
  • SEMI E39 : Specification for Object Services: Concepts, Behavior, and Services
  • SEMI E40 : Specification for Processing Management
  • SEMI E87 : Specification for Carrier Management
  • SEMI E90 : Specification for Substrate Tracking
  • SEMI E94 : Specification for Control Job Management
  • SEMI E142.2 : Specification for SECS-ll Protocol for Substrate Mapping
  • Windows XP Professional (32 & 64 bit) with .NET 2.0 ; 512MB RAM (minimum)
  • Windows 7 & 8 Professional (32 & 64 bit) with .NET 3.5 ; 2GB RAM (minimum)
  • Windows 10 & 11 Professional (32 & 64 bit) with .NET 4.x ; 4GB RAM (minimum)
X-ACT describes SECS message body using a general notation called SECS eXtensible Markup Language (SXML) which is developed by XYsoft. SXML is similar to the SML notation used in the SECS Standards documents but is based on the XML syntax which is widely used.

The following data types are supported by X-ACT: (SXML representation in parenthesis)

  • Binary ( B ) ; Boolean ( BOOL ) ; ASCII ( A )
  • 1-byte signed integer ( I1 ) ; 2-byte signed integer ( I2 ) ; 4-byte signed integer ( I4 ) ; 8-byte signed integer ( I8 )
  • 1-byte unsigned integer ( U1 ) ; 2-byte unsigned integer ( U2 ) ; 4-byte unsigned integer ( U4 ) ; 8-byte unsigned integer ( U8 )
  • 4-byte floating point ( F4 ) ; 8-byte floating point ( F8 )

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